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LAM 685-069171-100 Spectrometer Control Box, OES Endpoint Detection Controller for Plasma Etch Chamber
LAM 685-247270-001 FE-HD1 Mach1 Main Console I/O Controller Assembly, Semiconductor Etch Tool Safety & Field Signal Unit
LAM 685-247270-101 Main Console I/O Controller Assembly, Semiconductor Etch Tool System Interface Unit
LAM 810-046015-010 Gas Box Mass Flow Controller Interface Board, Semiconductor Etch Gas Distribution PCB
LAM 810-066590-004 Chamber Analog Interface PCB, Semiconductor Etch Analog Signal Conditioning Board
LAM 810-800081-022 Pulse Power Sample & Hold VME PCB, Plasma Pulsed RF Sampling Board for Semiconductor Etch Chamber
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