Name: LAM 810-102361-222 Rocker Valve Interface Board, Semiconductor Chamber Control PCB - MASSIVE
Brand: AMAT

Description

LAM 810-102361-222 Rocker Valve Interface Board, Semiconductor Chamber Control PCB

Product Description

The 810-102361-222 is a dedicated chamber rocker valve interface PCB manufactured by LAM Research for plasma etch semiconductor processing platforms. It serves as the local signal interface between the tool main controller and chamber-mounted rocker valves, handling valve drive commands, position feedback reading, vacuum interlock monitoring and fault diagnostics. The board features conformal-coated circuitry to withstand the cleanroom environment, including humidity, trace corrosive process gases and vibration. It converts digital control bus signals into valve drive outputs and returns hall-effect position sensor status back to the host software, ensuring precise timing of chamber pumping, venting and isolation valve sequences. It is a critical spare part for LAM etch tools, used to maintain chamber pressure stability and wafer processing cycle integrity.

Technical Parameters

Item	Specification
Manufacturer	LAM Research
Model	810-102361-222
Function	Rocker Valve Drive & Position Feedback Interface Board
Power Supply	24 VDC, auxiliary 5 VDC for sensor circuits
Signal Interface	Tool proprietary internal control bus; Hall sensor position inputs; valve drive outputs
Diagnostics	Open load, short circuit, valve stall and position mismatch fault reporting
PCB Protection	Conformal coating for semiconductor cleanroom / process gas resistance
Mounting	Internal chamber chassis PCB assembly
Operating Temperature	10 ℃ ~ 65 ℃
Humidity	10%–85% RH, non-condensing
Compliance	SEMI S2 semiconductor equipment safety standard
Weight	Approx. 0.21 kg
Status Indicators	LEDs for power, bus activity, valve drive and sensor signal

Recommended Related Models (8 units)

810-102361-R222: Revised updated revision of the rocker valve interface board
810-048425-001: LAM chamber vacuum pressure sensor board
810-002876-001: Main chamber system controller motherboard
810-065241-001: Gas box mass flow controller interface PCB
810-114278-001: RF match control board for LAM etch chamber
810-078432-001: Chamber door safety interlock PCB
853-045976-001: Rocker valve actuator assembly with hall sensor
810-032519-001: Backplane distribution board for chamber I/O

LAM 810-102361-222

Compatibility & Installation Traps

Compatibility

Primary host platforms: LAM Research 2300 Flex, Kiyo series plasma etch systems
Control software: LAM host fab tool software, chamber recipe and fault monitoring framework
Field devices: LAM chamber rocker valve assemblies with integrated Hall position sensors
Bus note: It uses LAM proprietary internal chamber bus; not compatible with standard PLC fieldbus systems.

Critical Installation Traps

Revision Matching: Board revision must match tool chamber software configuration. Mismatched revisions lead to valve position readback errors or recipe abort.
Conformal Coating Integrity: Do not scratch or peel the conformal coating during ESD handling. Damaged coating exposes copper traces to process gas byproducts and causes corrosion failures.
Hall Sensor Wiring Polarity: Reversed sensor wiring gives inverted valve position signals. The tool will trigger false “valve not seated” interlocks and halt wafer processing.
ESD Sensitivity: This is a high-sensitivity signal PCB. All handling must be done inside ESD controlled cleanroom stations with grounded wrist straps.
24V Drive Overload: A shorted valve coil on the rocker actuator can destroy board output drivers. Isolate valve coils before powering the new PCB.
Chassis Grounding: Improper chassis ground creates noise on low-level Hall sensor signals, leading to intermittent position flicker and random chamber faults.
Cleanroom Contamination Risk: Avoid touching PCB traces or connector pins with bare hands. Oil residue causes long-term leakage and drift under process heat.
Recipe Timing Dependence: After replacement, run valve teach / position calibration sequence. Skipping calibration results in incorrect valve stroke timing and pressure excursions.

Standard Operating Procedure (SOP)

Pre-installation inspection: Examine PCB for scratches, coating damage and connector pin deformation. Confirm part and revision match the tool BOM.
Isolation and lockout: Put the chamber into safe state, purge process gases, de-energize 24VDC chamber power and engage tool lockout/tagout.
Mechanical removal & fitment: Remove chassis cover, disconnect bus, valve drive and sensor connectors. Seat the replacement board into the chassis mounting points, secure fasteners.
Connector termination: Reconnect all harnesses, verify pin alignment and lock connector latches. Check Hall sensor and valve coil wiring polarity.
Power-up and self-test: Restore chamber auxiliary power. Confirm power and bus LEDs illuminate. Execute tool built-in I/O and valve self-test.
Valve calibration: Run rocker valve teach routine in chamber service menu; set fully open / fully closed Hall sensor reference positions.
Process validation: Execute dry chamber cycle, monitor valve position tracking, interlock status and chamber pressure stability. Run test wafer qualification before production release.
Decommissioning: Power down and lock out before extraction. Place old PCB into ESD shielding bag for failure analysis or disposal. Store spare boards in dry, ESD-controlled storage.