Aerotech BAI20-320 BAIL Series Coreless Linear Motor

Description

Aerotech BAI20-320 BAIL Series Coreless Linear Motor

Product Core Introduction

The BAI20-320 is a high-performance coreless linear motor from Aerotech’s BAIL series. It adopts U-shaped magnetic track and three-phase winding architecture, eliminating iron cogging force to deliver ultra-smooth motion and sub-micron positioning capability. Designed for precision motion systems in semiconductor and metrology equipment, this motor provides continuous thrust of 280 N and peak thrust up to 1500 N under 40 °C ambient temperature. It supports cleanroom ISO 100 operation, paired with high-resolution linear encoders for nanometer-class positioning repeatability. Widely used as spare replacement for legacy precision automation tools; new original units are available while surplus/refurbished stock is also offered for fab maintenance projects.

BAI20-320

Main Technical Specifications

Brand Same‑Series Model Recommendation

• BAI20-150: Short stroke 150mm coreless linear motor, same coil assembly, lower peak thrust, for small travel precision positioning stages.
• BAI20-220: 220mm magnetic track version, medium stroke, ideal for optical inspection and laser scanning platforms.
• BAI20-420: Extended 420mm track, longer travel, same force rating, for large-area wafer inspection systems.
• BAI30-320: Higher thrust variant with identical 320mm track, upgraded coil design for heavy payload precision motion.

Professional Quality Control Test Standard Operating Procedures (SOP)

5.1 Incoming Material Inspection

Neodymium magnet segments, coil windings, aluminum housing, insulation films and mounting hardware are inspected against Aerotech BOM. Magnetic flux testing, insulation resistance and dielectric withstand tests are performed for each batch of magnet and coil assemblies. Traceability records are retained for raw material lots.

5.2 Winding & Visual Inspection

After coil winding and potting, visual inspection checks winding uniformity, insulation integrity and surface defects. Continuity and hi-pot test verify no winding short or leakage current.

5.3 Static Force Characteristic Test

Mount coil and magnet track on calibrated test fixture. Measure force constant, thrust linearity and residual cogging force across full travel stroke. Reject units with force ripple exceeding specification limits.

5.4 Thermal & Dynamic Burn-in Test

Continuous power cycling burn-in for 48 hours at rated current. Monitor coil temperature rise, insulation resistance and force stability. Units with thermal drift or insulation degradation are screened out.

5.5 Environmental Stress Screening

Temperature cycling (10 ℃ ↔ +50 ℃), humidity soak and low-level random vibration per IEC 60068, to validate mechanical bonding and magnetic assembly stability during shipping and operation.

5.6 Final Acceptance Test

Full stroke dynamic motion test with servo drive and linear encoder. Verify velocity ripple, positioning repeatability and dynamic response. Complete dimensional, label and accessory inspection before packing and shipment.

New Motor Installation Guidelines

6.1 Pre-Installation Preparation

1. Power off servo drive and implement LOTO procedure. Confirm no power on motor drive circuit.
2. Wear anti-static wristband and gloves; use anti-static mat for coil handling.
3. Inspect BAI20-320 coil and magnet track for scratches, chipped magnets or insulation damage.
4. Prepare precision leveling gauge, torque wrench and non-magnetic mounting screws.
5. Check mechanical stage flatness and parallelism requirement.

6.2 Mechanical Installation

1. Mount U-shaped magnetic track first; adjust parallelism and flatness to drawing tolerance, torque mounting screws to specified value.
2. Install coil carriage onto linear bearing guide; maintain uniform air gap between coil and magnet track. Do not allow contact between coil and magnet steel.
3. Secure coil carriage to moving stage plate with non-magnetic fasteners.
4. Route high-flex motor cable properly, reserve bending radius and avoid sharp edges. Install cable chain if required.

6.3 Post-Installation Commissioning

1. Double-check air gap, mechanical clearance and cable routing before power-up.
2. Wire motor phase, thermal sensor and encoder cables to Aerotech servo drive.
3. Perform motor phase identification and auto-tune routine.
4. Run low-speed full-stroke jog test to check for mechanical interference.
5. Tune servo loops, test positioning repeatability and velocity ripple. Run continuous motion cycle for 30–60 minutes before formal production use.

Important Safety Note: Strong permanent magnetic field inside the magnet track. Keep ferromagnetic tools and magnetic-sensitive devices away during assembly.

BAI20-320

Application Scenarios & Product Characteristics

7.1 Application Scenarios

• Semiconductor wafer inspection, metrology and lithography auxiliary stages
• Laser micromachining, laser scribing and optical scanning systems
• Precision coordinate measurement machines (CMM)
• Flat panel display and solar cell precision positioning platforms
• Biomedical micro-assembly and high-resolution microscopy automation

7.2 Key Characteristics

• Zero cogging coreless design for ultra-smooth motion, minimal velocity ripple
• High peak-to-continuous thrust ratio for fast acceleration and high dynamic response
• ISO 100 cleanroom compatible construction
• Compact U-track structure, high force density with low moving mass
• Compatible with high-resolution linear encoders for sub-micron repeatability
• Low thermal drift design for long-term metrology stability
• Flexible high-flex cable for continuous reciprocating motion

FAQ (Frequently Asked Questions)

Q1: Motor has strong pull force during installation, coil touches magnet track. A1: Magnetic attraction is inherent. Use non-magnetic spacers during assembly. Keep coil centered, maintain uniform air gap, avoid collision which may scratch magnet coating.

Q2: Motion exhibits large force ripple and positioning instability. A2: Check magnet track parallelism and air gap uniformity. Verify motor phase wiring. Re-run servo auto-tune. Confirm encoder mounting and readhead alignment.

Q3: Motor over-temperature alarm during operation. A3: Check duty cycle, continuous current setpoint. Verify heat dissipation of coil carriage. Inspect thermal sensor wiring and thermal contact. Reduce operating current if payload exceeds rating.

Q4: Encoder position jumps during high-speed movement. A4: Check encoder readhead gap, cable shielding and grounding. Reduce cable movement stress. Check cable chain friction and mechanical vibration.

Q5: Can I replace BAI20-320 with BAI20-420 directly? A5: Coil assembly is compatible, but magnetic track length differs. Mechanical mounting and travel limit must be modified; servo parameters require re-tuning.

Q6: Is this motor suitable for vacuum environment? A6: Standard BAI20-320 is for atmospheric cleanroom only. Vacuum variant requires special coating and cable option, not standard stock.