Description
Brooks Automation 002‑1100‑10 VCE Assembly PCB Board
BROOKS 002-1100-10
Product Overview
002‑1100‑10 is a dedicated VCE assembly printed‑circuit board manufactured by Brooks Automation for semiconductor wafer handling robotic systems. It serves as core signal‑conditioning and interface hardware within the VCE (Vacuum Chamber Elevator) sub‑system, responsible for sensor signal acquisition, actuator drive logic and internal bus communication. This PCB coordinates elevator vertical motion, position feedback and safety interlock signals for vacuum wafer transfer equipment. Original OEM production is discontinued; it is supplied as aftermarket spare part for fab equipment maintenance, board replacement and system retrofitting.
Key Specifications
| Item | Parameter |
|---|---|
| Part Number | 002‑1100‑10 |
| Manufacturer | Brooks Automation |
| Product Type | VCE Assembly Interface PCB Board |
| Applicable Equipment | Brooks vacuum chamber elevator subsystem, semiconductor wafer handling robot platforms |
| Power Supply | 24 VDC logic power from robot controller chassis |
| Signal Interface | Multi‑channel digital input for position sensors; digital output for solenoid / actuator drive; internal parallel bus communication |
| PCB Treatment | Conformal coated for clean‑room and vacuum‑adjacent cabinet environment |
| Mounting | Fixed installation inside VCE mechanical assembly housing |
| Operating Temperature | 10 °C ~ +45 °C (Class‑1 clean‑room environment) |
| Storage Temperature | ‑20 °C ~ +70 °C |
| Humidity | 20‑80 % RH, non‑condensing |
| Weight | Approx. 0.42 kg |
| Status | Obsolete OEM production, aftermarket spare only |
Main Applications
- Semiconductor fab vacuum chamber elevator (VCE) motion control subsystem
- 200 mm / 300 mm wafer transfer robotic equipment
- Wafer load‑lock and vacuum process chamber auxiliary positioning control
- Existing Brooks wafer‑handling tool preventive maintenance and spare‑part replacement
- Refurbishment project for legacy Brooks vacuum automation platforms
- Safety interlock signal processing for vacuum wafer handling mechanisms
Related Series Models
- 002‑1100‑10 VCE Assembly main interface PCB
- 002‑1100‑xx Alternative revision variants of VCE board assembly
- 002‑series PCB family Brooks robot control & interface board portfolio
- 002‑4037‑02 Matching power‑pak power supply module for Brooks robot subsystems
BROOKS 002-1100-10
Core Features
- VCE‑specific signal conditioning: Dedicated circuit for elevator position sensor signal filtering and level conversion, acquires vertical position feedback of vacuum chamber elevator mechanism.
- Integrated actuator drive logic: On‑board drive circuits output control signals for VCE solenoids and small actuators to implement elevator lifting/lowering sequence.
- Conformal‑coated PCB design: Anti‑particle, anti‑humidity coating satisfies semiconductor clean‑room cabinet environmental requirements.
- Safety interlock signal processing: Monitors limit‑switch status, generates interlock trigger signals to robot main controller for mechanical over‑travel protection.
- Compact form‑factor design: Optimized layout for installation within confined VCE assembly housing, matches original mechanical mounting footprint.
- On‑board diagnostic points: Test points for field troubleshooting, assists maintenance engineers to quickly locate sensor, actuator or circuit faults.
Main Functions
- Collect digital position and limit‑switch feedback signals from VCE vacuum chamber elevator mechanical assembly, perform signal conditioning and transmit validated status data to robot main controller.
- Receive motion sequence commands from upper‑level robot controller, output drive signals to control VCE elevator lifting and lowering actuators and solenoid components.
- Execute hardware‑level travel‑limit interlock logic; trigger safety inhibit signal to stop VCE movement once over‑travel condition is detected.
- Handle internal subsystem bus communication, exchange real‑time status and fault information with robot guidance controller.
- Detect local board‑level circuit anomalies and sensor faults, upload diagnostic alarm information for equipment host monitoring.
- Cooperate with other mechanical and electrical components to complete wafer transfer hand‑off sequence inside vacuum chamber environment.
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